Direct Maskess Aligner und Laserlithographiegeräte

Abschnitt I: Öffentlicher Auftraggeber I.1) Name und Adressen: Offizielle Bezeichnung: Walter Schottky Institut / TU München; Nationale Identifikationsnummer: DE811193231; Straße, Hausnummer: Am Coulombwall 4; Ort: Garching; NUTS-Code: DE212; Postleitzahl: 85748; Land: DE; Kontaktstelle(n): LS Prof. Finley; E-Mail: finley@wsi.tum.de; Internetadresse: www.wsi.tum.de; Internetadresse des Beschafferprofils: www.wsi.tum.de Abschnitt II: GegenstandII.1) Umfang der Beschaffung II.1.1) Bezeichnung des Auftrags: Direct Maskess Aligner und Laserlithographiegeräte; Referenznummer der Bekanntmachung (Vergabenummer): WSI/2022-E24/2 II.1.2) CPV-Code Hauptteil: 38000000; CPV-Code Zusatzteile: nicht angegeben II.1.3) Art des Auftrags: Lieferauftrag II.1.4) Kurze Beschreibung: Direct Maskess Aligner and Laser Lithoghraphy tools to be installed in the laboratories of the Technical University of Munich. A translation of the entire document into German language is available on request. The desktop and stand-alone maskless laser writers shall be used for contact-free lithography on hybrid (superconducting and semiconducting) quantum circuits and devices, nanofabrication without the need for conventional lithography masks and avoiding all physical contact with delicate quantum devices. Hereby, two instruments that will be used in tandem are required: (i) a table-top system that will be used in combination with a thermolithography system for rapid prototyping and quantum device imaging and repair and provide a resolution of ~1µm and (ii) a stand-alone system that can be used for higher resolution (<0.8µm) rapid, large scale (15cm x 15cm) patterning of large arrays of devices. Both devices shall consist of direct laser lithography units, imaging and autofocus systems that will allow for precise positioning and stitching of multiple lithographic write fields and overlays. The table-top device will be operated within an ISO-4 area of a clean room, while the stand-alone device should be