Semi-automated probe system with accessories

Stammdaten

Auftraggeber

IHP GmbH - Leibniz-Institut für innovative Mikroelektronik, Frankfurt (Oder)

Veröffentlicht

12.05.2026

Notice-Typ

Vergabeergebnis

Verfahrensart

Offenes Verfahren

CPV-Code

38000000 — Labor-, optische und Präzisionsgeräte

Rechtsgrundlage

EU-Oberschwelle

Beschreibung

The tender concerns the procurement of an integrated system for optical and opto-electrical characterization at wafer and chip level in the visible (VIS) spectral range. The system shall consist of a 200 mm semi-automated probe station equipped with a temperature-controlled chuck, microscope, and manual manipulators for RF/DC probes as well as for optical fibers and fiber arrays. The system will be installed in a laboratory environment outside the cleanroom. The scope of supply includes delivery to the point of use (laboratory), installation, commissioning, and two days of user training. The system must be new (no refurbished chambers or parts) and comply fully with CE requirements and the applicable EU Machinery Directive (2006/42/EC as amended). The operating system shall be Microsoft Windows 11. Remote control via GPIB (IEEE-488.2) and LAN is required. A user manual must be provided, and safety instructions must be supplied in German. The system must include a minimum warranty period of 24 months for all parts. Power supply requirements are 230/400 VAC, 50 Hz, separate PE/N (TN-S network). Tool delivery shall be in accordance with INCOTERMS 2020 DDP or DAP to a defined place inside IHP (maximum transport dimensions for move-in: width 140 cm, height 200 cm). In case of delivery from outside the EU, the supplier shall act as importer. As an optional item, bidders shall quote a separate annual maintenance contract for three years, including stage planarization, lubrication, and thermal chuck calibration.

Vergabe-Status

Vergabe-Status

Auftrag vergeben

Vertragsabschluss

04.05.2026

Verfahrensverlauf — alle 2 Veröffentlichungen

• Ausschreibung
• Vergabeergebnis

Zuständige Vergabekammer (laut Bekanntmachung)

Vergabekammer des Landes Brandenburg beim Ministerium für Wirtschaft und Europaangelegenheiten, Potsdam

Angabe aus der TED-Bekanntmachung. Im Streitfall ist die tatsächlich zuständige Vergabekammer nach §§ 155 ff. GWB maßgeblich, nicht zwingend die hier genannte.

Bieter (1)

• ATV Systems GmbH (Dresden)